State-of-art photoemission spectroscopy with laboratory-based light sources

Publication

Author: Takahiro Hashimoto, Masatake Machida Oyo Buturi
URL: https://doi.org/10.11470/oubutsu.91.9_568
Date: 2022
Instruments: HAXPES Lab

Photoelectron spectroscopy is an experimental technique to directly observe the electronic structure of materials. In particular, Hard X-ray Photoelectron Spectroscopy (HAXPES) allows chemical states analysis of buried layers in electronic devices in a non-destructive manner. Laboratory-based HAXPES measurements have been achieved due to the latest developments in light sources and photoelectron analysers. In this review, we introduce the basic principles of photoelectron spectroscopy, as well as measurements with a laboratory-based HAXPES system equipped with a Ga source, and method to analyze depth profile using data science.