Materials Innovation Platforms (MIPs) integrate instrumentation for growth with sophisticated in-situ characterization tools. Samples can thus be analysed at intermediate process steps to understand cause-effect correlations of a novel material’s growth and structure without leaving the clean UHV environment at any time. Scienta Omicron’s broad portfolio enables us to act as a single source supplier and a reliable partner for the design, production and in-field support, ensuring a smooth delivery process and a high system uptime.
Linear Transfer Line (LTL)
The Linear Transfer Line (LTL) is a backbone for reliable and convenient sample handling in large UHV systems. Its modular design allows for cost-effective individual configurations, particularly of its length, the pumping system and the sample plates or wafers used. The LTL is easy to extend with additional segments to allow users to extend their UHV cluster step-by-step.
Radial Distribution Chamber (RDC)
The Radial Distribution Chamber (RDC) is based on a continuously rotatable telescopic transfer arm that can be equipped with a variety of end effectors for flag-style sample holders or wafer carrier rings for up to 4” wafers. The port configuration of the RDC can be adjusted to arrange the connected modules such that the available lab space is used in an optimal way.
The MISTRAL control system offers intuitive, user-friendly operation and full visualisation of all vacuum system components. MISTRAL is built on reliable industry technology and allows a complete and fast status overview and control of valves, pumps, pressure gauges and bakeout equipment. It is delivered with a preconfigured bakeout procedure, which can easily be adapted by the user. Several interlocks ensure a safe operation of the vacuum system at all times.
The UHV suitcase offers a safe and convenient way to exchange up to six flag-style sample holders between separated UHV systems, be it in the same building or across continents. With its very compact shape and low weight, the suitcase can be mounted on a large number of UHV systems. True UHV conditions ensure that the samples arrive at their destination in perfect conditions.