Materials Innovation Platform (MIP) for Novel Quantum Materials

University of Waterloo - Institute of Quantum Computing (IQC)

PES XPS UPS PVD MBE ALD Sputter Deposition CVD

Reference Number: 121547

Materials Innovation Platform (MIP) to enable research on the combination of different material classes for the development of novel quantum materials.

5 deposition modules for MBE of oxides, metals, and topological insulators
Sputtering for superconducting and magnetic materials
Surface analysis module for XPS, UPS, AES, ISS and AFM
Linear transfer line (LTL) with true UHV 2" wafer handling
Load-lock, wafer heating and plasma cleaning, mask handling
UHV suitcase for sample exchange with ALD and LT-SPM

Functional Quantum Materials, University of Waterloo

Integrated Instruments

EVO 25/50 MBE

HIS 13

Materials Innovation Platform (MIP) for Novel Quantum Materials

University of Waterloo - Institute of Quantum Computing (IQC)

Integrated Instruments

EVO 25/50 MBE

HIS 13

Linear Transfer Line (LTL)

This website uses cookies

Statistics