High Performance Fine Focus Ion Source: A High Quality Upgrade for Sample Cleaning and Depth Profiling


The depth profiling upgrade integrates a high-quality focussed ion beam source seamlessly in your Scienta Omicron system. The hot filament ion source is a professional tool for sample cleaning, depth profiling with XPS or Auger electron spectroscopy. It can be used as a high-quality ion source for ISS/LEIS or as a low energy source for charge neutralisation.

Every upgrade includes a prior compatibility check by our Scienta Omicron system designers in Taunusstein and comes with suggestions for an individual system integration of the ion source.

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