Surface Science Analysis Cluster System

Samsung Electronics - D&S Research Center

Reference Number: 183917

Cluster system offering multiple complementary surface science techniques, as XPS, UPS and AFM for detailed sample characterisation. The analysis system is integrated into a linear transfer line to ensure future expandability.

Customised Multiprobe MXPS system for 2” wafer samples
Equipped with Argus CU electron analyser, monochromated Al Kα X-ray source, fine focus ion gun and VUV light source to enable UPS
Full manipulator motorization, allowing XPS measurements on multiple positions on a wafer
Large sample AFM capable of measurements directly on a 2” wafer
AFM operation modes: Contact mode with normal force/lateral force detection and non-contact mode
Vibration decoupling for high-resolution SPM measurements
Magnetic coupled linear transfer line