Materials Innovation Platform (MIP) with research focus on fabrication of epitaxially grown III-N semiconductors for optoelectronics and spintronics using a state-of-the-art cleanroom lab.
4" wafer cluster system with radial distribution chamber
2 PRO 100 III-N MBE modules for optoelectronics and semi-magnetics
Analysis module for XPS, UPS, AES & Large Sample SPM on 4" wafers
