Epitaxy Laboratory

Wroclawskim Centrum Badan EIT+ Ltd

PES XPS SPM PVD MBE

Reference Number: 121426

Materials Innovation Platform (MIP) with research focus on fabrication of epitaxially grown III-N semiconductors for optoelectronics and spintronics using a state-of-the-art cleanroom lab.

  • 4" wafer cluster system with radial distribution chamber
  • 2 PRO 100 III-N MBE modules for optoelectronics and semi-magnetics
  • Analysis module for XPS, UPS, AES & Large Sample SPM on 4" wafers

Integrated Instruments

PRO 75/100 MBE
MATRIX SPM Controller | © Scienta Omicron
MATRIX SPM Control
SX300
Radial Distribution Chamber | © Scienta Omicron
Radial Distribution Chamber (RDC)
Materials Innovation Platform | © Scienta Omicron
Materials Innovation Platform (MIP)
SX300

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