PRO 75/100 MBE for Oxide materials

NRL Naval Research Laboratory - Vacuum Electronics Branch


Reference Number: 123708

Standalone PRO 75/100 MBE system configured for the growth of oxide materials on wafer samples up to 4” in diameter.

  • Multipocket e-beam evaporator with crossbeam RGA for improved flux stability
  • Large Turbomolecular pump with 2150 l/s nominal pump speed for Nitrogen
  • 10x DN63CF ports and one DN250CF ports for evaporation sources

Integrated Instruments