1. Home

NanoScan Lab with FIB/SEM and Large Sample SPM

Forschungszentrum Jülich - Helmholtz Nano Facility (HNF)

SEM FIB SPM STM

Reference Number: 184704

Extension to the large 14 modules HNF cluster by a NanoScan Lab for SEM/FIB and an SPM module. Both modules are interfaced to the existing cluster and work on 4" samples.

  • NanoScanLab 
  • LS SPM for scanning probe microscopy on 4" wafers
  • COBRA FIB
  • UHV Gemini SEM

Integrated Instruments

Linear Transfer Line System | © Scienta Omicron
Linear Transfer Line (LTL)
Radial Distribution Chamber | © Scienta Omicron
Radial Distribution Chamber (RDC)
NanoScan Lab with optional preparation chamber | © Scienta Omicron
NanoScan Lab

This website uses cookies

We use cookies to personalise content and ads, to provide social media features and to analyse our traffic. We also share information about your use of our site with our social media, advertising and analytics partners who may combine it with other information that you’ve provided to them or that they’ve collected from your use of their services

Read more about this

Statistics

Statistic cookies help website owners to understand how visitors interact with websites by collecting and reporting information anonymously.

Show details Hide details