MULTIPROBE System with XPS, UPS, and Large Sample SPM

Tohoku University - Research Institute of Electrical Communication


Reference Number: 81003

Research focus on the relation between electronic properties and device performances of Dirac electrons and two-dimensional electron systems such as graphene and GaN and controlling the surface structural and electronic properties of graphene in terms of the crystallographic orientation of the Si substrate.
  • Multiprobe with XPS, UPS, STM, LEED
  • Chamber for 2 inch wafer carrier ring
  • Preparation chamber for high temperature heating, LEED, MBE

Integrated Instruments