Typical RHEED Pattern | © Scienta Omicron
20 kV RHEED Electron Gun


Complete RHEED Solution


  • High brightness and small diameter beam
  • Beam optimised and aligned
  • Beam rocking available
  • Fully computerised power supply and remote control

Reflection High-Energy Electron Diffraction (RHEED) is an in-situ characterisation tool, often used in Molecular Beam Epitaxy (MBE) systems. Due to the surface sensitivity of the technique, the formation of individual layers can be monitored during the growth. A complete RHEED system consists of a fluorescent screen on lead glass, an electron source, a power supply and a control unit with remote control.

We offer RHEED electron sources in the range of 15 to 30 keV. By combining electrostatic and magnetic elements, the source produces a high brightness on a small size spot, with low beam divergence, and with low outgassing rate. Beam rocking allows the precise adjustment and variation of the incidence angle using electronic control. The gun mounts via a DN40CF (2.75” OD) flange to the chamber. The RHEED system is fully bakeable. Operation at higher pressure requires a differential pumping option.

The power supply comes in a 19” rack-mounted case and offers gun settings, such as energy, filament current, and beam intensity, which are displayed using digital readouts. The power supply is remote-controlled by a compact control box to adjust the beam intensity, focus, and position. The electron beam can be turned on and off using the electronic beam blanking, keeping the electron load on the sample very low. The blanking signal can also be triggered with external signals.

Contact Us Email: info@scientaomicron.com


Electron source:
Energy Range

7 – 20 kV

Beam Spot Size

< 100 µm

Focus Lens



Magnetic X-Y

Beam Rocking

Beam Blanking

Mounting Flange


Bakeout Temp.

200 °C

For full specifications and more information about product options, please do not hesitate to contact your local sales representative. Find the contact details here: Contact Us