Materials Innovation Platform (MIP) with MBE, PVD and Surface Analysis
University of Texas at Dallas - Department of Materials Science and Engineering
XPS UPS Sputter Profiling Charge Comp SEM STM Sputter Deposition PVD MBE RHEED ALD ARXPS PES
Reference Number: 035008
- Linear transfer line for 4" wafer carrier rings
- SiGe MBE and metal MBE modules
- Sputter Module
- Heater chamber for thermal annealing
- Interfacing to 3rd party ALD module
- Surface analysis module for XPS, UPS & Large Sample SPM on 4" wafers
