HTEZ/HTS

High Temperature Effusion Cells (HTEZ):

• Suitable for the evaporation of most materials evaporated at temperatures up to 1900 °C 
• Ultra-high temperature version with 1mm thick free-standing tungsten filament for temperatures > 2000 °C
• Standard crucible sizes: 1.5 cc, 10 cc 
• Standard crucible material: Al₂O₃, Tungsten or Tantalum
• Other crucible materials: BeO, Iridium, Y₂O₃ or Pyrolytic Graphite (PG)
• Compact version with cooling shroud and integrated shutter on a DN40CF (2.75” OD) mounting flange and 1.5cc crucible capacity; ideally suited for small research surface analysis systems
• Larger size effusion cell with 10 cc crucible capacity and with separate cooling shroud

High Temperature Effusion Cells (HTS):

• Typical applications are the evaporation of elemental boron for p-type doping in Si MBE
• Evaporation of Ge in Si/Ge MBE (special Ge effusion cell with PBN crucible and Si top orifice plate)
• Evaporation of CaF₂, Ti, Ni, Cr, Au, Er, La
• Various crucible sizes and materials, crucible capacities 5 cc, 25 cc, 100 cc
• Clean operation in UHV up to 2000 °C
• Ultra high purity pyrolytic graphite (PG) filament
• Water cooled electrical contacts
• Inner filament shielding with PG parts
• No ceramic parts in the hot zone