PRO 75/100 MBE
Research Tools for Epitaxial Layer Growth
- MBE system optimised for 4 inch wafer growth
- Large effusion cell capacity for increased up-time
- Flexible configurations, from topological insulators to semiconductors and metal oxides
- In-situ growth monitoring
- Reliable & fast sample transfer
- Growth process controlled by advanced software
- Designed as a module of a Materials Innovation Platform (MIP)
The PRO-75/100 MBEs are deposition tools for material research under UHV conditions on substrates up to 4 inches in diameter. They are flexible system platforms suitable for a large range of MBE applications such as the growth of 2D materials, intermetallic compounds, oxide heterostructures or semiconductors. The PRO-75/100 MBEs include superior evaporation control software and offers multiple ports for in-situ characterisation.
The PRO-75/100 MBE systems are dedicated growth systems with a load lock chamber and with an optional preparation/storage chamber. The substrate sizes are either 3” (PRO-75) or 2” (PRO-100). The carefully designed chamber with up to 12 effusion cells shows excellent thickness uniformity for all substrate sizes.
The PRO-75/100 MBE systems are designed to fulfil the highest and most stringent requirements of modern thin-film deposition. They are suitable and optimised for the growth of ultra-high purity semiconductors and related material systems.
All PRO-75/100 MBE systems come with the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.
More Information
MISTRAL & Evaporation Control
The PRO-75/100 MBEs include the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. Integrated safety interlocks protect the UHV system in case of power failure or a drop in water flow.
The evaporation control software offers a powerful script editor for programming individual process recipes. Additionally, 24/7 data logging of all relevant system parameters is included.
With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.
Applications
The PRO-75/100 MBEs are designed for forefront research. Our customers use their systems for a variety of material systems, such as:
- Topological Insulators
- 2D Materials, e.g. Transition metal dichalcogenides (TMDCs)
- Oxides
- Organics
- Intermetallic Compounds
- Semiconductors
- Heterostructures
- Thin Film Solar Cells
Specifications
Target Specification*
Stainless steel
< 1×10-10 mbar
Ion gauge
Doublewalled, designed for LN2
Up to 4“ diameter
* Specifications for standard configuration. Customisations can influence specifications.
Up to 12 ports: 6x DN100CF (6” OD) + 6x DN63CF (4.5” OD)
Equipped with Viewport Shutters
Growth control software included
RHEED
Quartz Micro Balance
Beam Flux Monitor
Quadrupole mass analyser (RGA)
Pyrometer
For full specifications and more information about product options, please do not hesitate to contact your local sales representative.
Reference systems
Nanofabrication & Epitaxy Cluster
The Nanofabrication and Epitaxy Cluster is a multi-user platform of the Helmholtz Foundation for research on structures and devices for quantum computing, semiconductor technology and materials, and concepts for novel devices. Extended in 2020 by a NanoScanLab (FIB/SEM), Large Sample SPM for 4" wafers, and LEED module.
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Epitaxy Laboratory
Materials Innovation Platform (MIP) with research focus on fabrication of epitaxially grown III-N semiconductors for optoelectronics and spintronics using a state-of-the-art cleanroom lab.
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PRO 75/100 MBE for Oxide materials
Standalone PRO 75/100 MBE system configured for the growth of oxide materials on wafer samples up to 4” in diameter.
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Materials Innovation Platform (MIP) with MBE, PVD and Surface Analysis
Research focus on nanoscale materials, interfaces and advanced devices including, high-k gate dielectrics, gate electrodes and novel 2D materials (TMDs, e.g. MoS2).
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Materials Innovation Platform (MIP) with MBE and Surface Analysis
Institute for Integrative Nanosciences (IIN) research activities cover flexible and printable magneto-electronic devices, self-propelled nanotools, strain-tunable single photon devices, ultra-compact self-wound batteries, as well as binary GaAs, AlAs, InAs layers, ternary InGaAs & AlGaAs compounds and self-assembled InAs and GaAs quantum dots.
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MBE Solutions: Modular MBE Systems
The MBE Solution is comprised of Lab10 MBE, EVO-25/-50 and PRO-75/100 enabling MBE and analysis in a single system. The key features include 1) excellent sample thickness and doping homogeneity; 2) layer growth with outstanding performance; 3) low background doping level; 4) excellent carrier density and mobility; and 5) very low defect density.
