PRO-75 MBE System  | © Scienta Omicron
Example for a PRO-75 MBE system equipped with a multi-pocket e-beam evaporator and a crossbeam RGA for improved beamflux stability. Figure from project: 123708

PRO 75/100 MBE

Research Tools for Epitaxial Layer Growth

PVDMBELaser MBE

  • MBE system optimised for 4 inch wafer growth
  • Large effusion cell capacity for increased up-time
  • Flexible configurations, from topological insulators to semiconductors and metal oxides
  • In-situ growth monitoring
  • Reliable & fast sample transfer
  • Growth process controlled by advanced software
  • Designed as a module of a Materials Innovation Platform (MIP)

The PRO 75/100 MBEs are deposition tools for materials research under UHV conditions on substrates up to 4 inches in diameter. They are flexible system platforms suitable for a large range of MBE applications such as the growth of 2D materials, intermetallic compounds, oxide heterostructures or semiconductors. The PRO 75/100 MBEs include superior evaporation control software and offers multiple ports for in-situ characterisation.

The PRO 75/100 MBE systems are dedicated growth systems with a load lock chamber and with an optional preparation/storage chamber. The substrate sizes are either 3” (PRO 75) or 4” (PRO 100). The carefully designed chamber with up to 12 effusion cells shows excellent thickness uniformity for all substrate sizes.

The PRO 75/100 MBE systems are designed to fulfil the highest and most stringent requirements of modern thin film deposition. They are suitable and optimised for the growth of ultra-high purity semiconductors and related materials systems.

All PRO 75/100 MBE systems come with the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.

Contact Us Email: info@scientaomicron.com

More Information

MISTRAL & Evaporation Control

The PRO 75/100 MBEs include the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. Integrated safety interlocks protect the UHV system in case of power failure or a drop in water flow.

The evaporation control software offers a powerful script editor for programming individual process recipes. Additionally, 24/7 data logging of all relevant system parameters is included.

With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.

Applications

The PRO 75/100 MBEs are designed for forefront research. Our customers use their systems for a variety of materials systems, such as:

  • Topological Insulators
  • 2D Materials, e.g. Transition metal dichalcogenides (TMDCs)
  • Oxides
  • Organics
  • Intermetallic Compounds
  • Semiconductors
  • Heterostructures
  • Thin Film Solar Cells

Specifications

Property

Target Specification*

Vacuum tank

Stainless steel

Pressure

< 1×10-10 mbar

Pressure sensor

Ion gauge

Cryopanel

Doublewalled, designed for LN2

Substrate size

Up to 4“ diameter

* Specifications for standard configuration. Customisations can influence specifications.

Source ports

Up to 12 ports: 6x DN100CF (6” OD) + 6x DN63CF (4.5” OD)

Viewports

Equipped with Viewport Shutters

Software package

Growth control software included

Preconfig. flanges

RHEED

Quartz Micro Balance

Beam Flux Monitor

Quadrupole mass analyser (RGA)

Pyrometer

For full specifications and more information about product options, please do not hesitate to contact your local sales representative.

Results

Phase Identification and Ordered Vacancy Imaging in Epitaxial Metallic Ta2N Thin Films

2021

Epitaxial transition metal nitrides (TMNs) are an emerging class of crystalline thin film metals that can be heteroepitaxially integrated with common group III-nitride semiconductors such as GaN and AlN. Within a binary family of...

Crystal Field Model Simulations of Magnetic Response of Pairs, Triplets and Quartets of Mn3+ ions in GaN

2020

A ferromagnetic coupling between localized Mn spins was predicted in a series of ab initio and tight binding calculations and experimentally verified for the dilute magnetic semiconductor Ga1−xMnxN. In the limit of small Mn concentrations,...

Reference Systems

Downloads

MBE Solutions: Modular MBE Systems

21/04/2021 4.63 MB

The MBE Solution is comprised of Lab10 MBE, EVO-25/-50 and PRO-75/100 enabling MBE and analysis in a single system. The key features include 1) excellent sample thickness and doping homogeneity; 2) layer growth with outstanding performance; 3) low background doping level; 4) excellent carrier density and mobility; and 5) very low defect density.

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