Lab10 MBE System with Knudsen type effusion cells  | © Scienta Omicron
Lab10 MBE system with Knudsen type effusion cells and customised load lock. (Figure from project: 162614)
3D Illustration of the Lab10 MBE system  | © Scienta Omicron
3D graphic showing a Lab10 MBE system (stand-alone version).

Lab10 MBE

Fundamental Research Tool for Epitaxial Layer Growth


  • Research tool for innovative materials development
  • Configurable and customisable
  • Low cost of ownership
  • Growth process controlled by advanced software
  • Defined interface to Scienta Omicron analysis systems

The Lab10 MBE is a small sample deposition tool for explorative materials research under UHV conditions. It is a flexible system platform suitable for a large range of MBE applications such as the growth of 2D materials, intermetallic compounds, oxide heterostructures or organic layers. The Lab10 MBE includes superior evaporation control software and offers multiple ports for in-situ characterisation.

The system consists of a deposition chamber and an introduction chamber for sample exchange. The deposition chamber is equipped with an efficient cryopanel and an exchangeable cluster flange. It can be equipped with a wide range of high-quality effusion sources. Additional ports for in-situ growth control and view-ports are prepared. The Lab10 MBE employs the MISTRAL control system with touch screen or remote PC interface. Furthermore, safety interlocks protect the UHV system in case of power failure.

Figure below: Dimensions of a Lab10 MBE in a stand-alone configuration. The compact dimensions of the Lab10 MBE system of 1800 x 920 x 1800 mm allow to integrate it in an existing laboratory or as an ideal module of a multi-technique cluster system. In standard configuration, the deposition chamber is pumped by an ion getter pump, a titanium sublimation pump and a turbomolecular pump, backed by an oil-free roughing pump.

The Lab10 MBE is fully compatible with the broad scope of Scienta Omicron analytic modules. Ultra-clean layer growth can be combined with advanced surface science techniques like SPM, AFM, XPS, HAXPES, ARPES and many others without breaking the vacuum. Materials Innovation Platforms (MIP) integrate instrumentation for growth and detailed characterisation of samples in-situ. Not only is sample quality preserved by maintaining UHV conditions, but analysis and growth can be done at intermediate process steps and performed far more rapidly than if the instrumentation was separated. Due to the compact footprint, the Lab10 MBE is an ideal module for a MIP, saving valuable lab space.

More Information

Deposition Chamber Concept

The deposition chamber of the Lab10 MBE is optimised for epitaxial growth of thin films on small sample sizes. Therefore, it is equipped with an efficient cryoshroud, to reduce the heat load around the manipulator and the effusion cells. The large pumping ports allow high pumping speeds and are key for true ultra-high vacuum performance.

The exchangeable bottom cluster flange can be equipped with a wide range of high-quality effusion cells, cracker sources and electron beam evaporators. Additional ports for in-situ growth control and viewports are prepared.

Its proven chamber design with up to 8 effusion cells is revealed in an excellent thickness homogeneity for a 10x10 mm² substrate. The effusion cell capacity can range from 1 cm3 up to 35 cm3 for layer growth.

Dimensions of a Lab10 MBE

MISTRAL & Evaporation Control

The Lab10 MBE includes the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. Integrated safety interlocks protect the UHV system in case of power failure or a drop in water flow.

The evaporation control software offers a powerful script editor for programming individual process recipes. Additionally, 24/7 data logging of all relevant system parameters is included.

With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.


The Lab10 MBE is designed for forefront research. It is a proven platform with more than thirty of such small-sample systems installed worldwide. Our customers use their systems for a variety of materials systems, such as:

  • Topological Insulators
  • 2D Materials, e.g. Transition metal dichalcogenides (TMDCs)
  • Oxides
  • Organics
  • Intermetallic Compounds
  • Semiconductors
  • Heterostructures
  • Thin Film Solar Cells



Target Specification*

Vacuum tank

Stainless steel


< 1×10-10 mbar

Pressure sensor

Ion gauge



Baking temperature

150 °C


Equipped with Viewport Shutters

Introduction Chamber


Software package


Preconfig. flanges


Quartz Micro Balance

Beam Flux Monitor

Quadrupole mass analyser (RGA)


10 x 10 mm sample size

Temperature RT < T < 1170 K

X/Y- travel ± 8 mm

Z- travel 50 mm

Azimuthal rotation ± 180°

Provision to work with direct sample heating

Cluster flange

3x DN63CF

4x DN40CF

1x central DN40CF

* Specifications for standard configuration. Customizations can influence specifications.

** Standard manipulator. Options for higher temperatures, LN2 cooling, oxygen resistance, and continuous rotation are available.

For full specifications and more information about product options, please do not hesitate to contact your local sales representative.

Reference systems


Lab10 MBE: Compact Solution for Epitaxial Layer Growth

08/10/2020 3.09 MB

The Lab10 MBE is a turnkey small sample research tool for innovative material development under UHV conditions. This system is designed to fulfill the highest and most stringent requirements of modern thin-film deposition. Furthermore, the small sample concept is intended to interface the MBE system with an UHV analysis module to offer the best platform for fundamental research of novel materials.

MBE Solutions: Modular MBE Systems

4.63 MB

The MBE Solution is comprised of Lab10 MBE, EVO-25/-50 and PRO-75/100 enabling MBE and analysis in a single system. The key features include 1) excellent sample thickness and doping homogeneity; 2) layer growth with outstanding performance; 3) low background doping level; 4) excellent carrier density and mobility; and 5) very low defect density.

Services & Spare-parts

Find more Spare-parts