EVO 50 MBE System  | © Scienta Omicron
EVO-50 MBE system with several Knudsen type effusion cells, linear shutters and a plasma source. The deposition chamber is pumped by an ion getter pump and a cryopump. Configured for integration to a Materials Innovation Platform (MIP).
Dual EVO system | © Scienta Omicron
Dual EVO system, consisting of two deposition chambers connected to a shared buffer chamber. This configuration is particularly powerful for sequential deposition of thin film layers with incompatible processes.
Customized EVO system | © Scienta Omicron
Customized EVO system with extended buffer chamber. Configured for growth of 2D materials.

EVO 25/50 MBE

Small Scale Research Tools for Epitaxial Layer Growth

PVDMBELaser MBE

  • MBE system optimised for 2 inch wafer growth
  • Compact design and small system footprint
  • Flexible configurations, from topological insulators to semiconductors and metal oxides
  • In-situ growth monitoring
  • Reliable & fast sample transfer
  • Growth process controlled by advanced software
  • Designed as a module of a Materials Innovation Platform (MIP)

The EVO-25/50 MBEs are deposition tools for explorative materials research under UHV conditions on substrates up to 2 inches in diameter. They are flexible system platforms suitable for a large range of MBE applications such as the growth of 2D materials, intermetallic compounds, oxide heterostructures or semiconductors. The EVO-25/50 MBEs include superior evaporation control software and offers multiple ports for in-situ characterisation.

The EVO-25/50 MBE systems are dedicated growth systems with a load lock chamber and with an optional preparation/storage chamber. The substrate sizes are either 1” (EVO-25) or 2” (EVO-50). Alternatively, the systems can be adapted to surface science sample plates. The carefully designed chamber with up to 10 effusion cells shows excellent thickness uniformity for all substrate sizes.

Due to the small footprint the EVO-25/50 MBEs can be configured to be either standalone systems with a buffer chamber and sample load lock or integrated with a linear transfer line or a radial distribution chamber as a part of a Materials Innovation Platform (MIP).

All EVO-25/50 MBE systems come with the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.

Contact Us Email: info@scientaomicron.com

More Information

Software: MISTRAL & Evaporation Control

The EVO-25/50 MBEs include the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. Integrated safety interlocks protect the UHV system in case of power failure or a drop in water flow.

The evaporation control software offers a powerful script editor for programming individual process recipes. Additionally, 24/7 data logging of all relevant system parameters is included.

With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.

Applications

The EVO-25/50 MBEs are designed for forefront research. Our customers use their systems for a variety of materials systems, such as:

  • Topological Insulators
  • 2D Materials, e.g. Transition metal dichalcogenides (TMDCs)
  • Oxides
  • Organics
  • Intermetallic Compounds
  • Semiconductors
  • Heterostructures
  • Thin Film Solar Cells

Specifications

Property

Target Specification*

Vacuum tank

Stainless steel

Pressure

< 1×10-10 mbar

Pressure sensor

Ion gauge

Cryopanel

Double walled, designed for LN2

Substrate size

Up to 2“ diameter

* Specifications for standard configuration. Customisations can influence specifications.

Source ports

Up to 10 ports DN63CF

Viewports

Equipped with Viewport Shutters

Software package

Growth control software included

Preconfig. flanges

RHEED

Quartz Micro Balance

Beam Flux Monitor

Quadrupole mass analyser (RGA)

Pyrometer

For full specifications and more information about product options, please do not hesitate to contact your local sales representative.

Reference Systems

Downloads

EVO-50 MBE System: Next Generation of Customisable MBE Solution

16/04/2021 1.85 MB

The EVO-50 MBE System is designed to fulfil the highest and most stringent requirements of modern thin-film deposition. It is suitable and optimised for the growth of ultra-high purity semiconductors and related material systems.

MBE Solutions: Modular MBE Systems

21/04/2021 4.63 MB

The MBE Solution is comprised of Lab10 MBE, EVO-25/-50 and PRO-75/100 enabling MBE and analysis in a single system. The key features include 1) excellent sample thickness and doping homogeneity; 2) layer growth with outstanding performance; 3) low background doping level; 4) excellent carrier density and mobility; and 5) very low defect density.

Services & Spare parts

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