EVO 25/50 MBE
Small Scale Research Tools for Epitaxial Layer Growth
- MBE system optimised for 2 inch wafer growth
- Compact design and small system footprint
- Flexible configurations, from topological insulators to semiconductors and metal oxides
- In-situ growth monitoring
- Reliable & fast sample transfer
- Growth process controlled by advanced software
- Designed as a module of a Materials Innovation Platform (MIP)
The EVO-25/50 MBEs are deposition tools for explorative material research under UHV conditions on substrates up to 2 inches in diameter. They are flexible system platforms suitable for a large range of MBE applications such as the growth of 2D materials, intermetallic compounds, oxide heterostructures or semiconductors. The EVO-25/50 MBEs include superior evaporation control software and offers multiple ports for in-situ characterisation.
The EVO-25/50 MBE systems are dedicated growth systems with a load lock chamber and with an optional preparation/storage chamber. The substrate sizes are either 1” (EVO-25) or 2” (EVO-50). Alternatively, the systems can be adapted to surface science sample plates. The carefully designed chamber with up to 10 effusion cells shows excellent thickness uniformity for all substrate sizes.
Due to the small footprint the EVO-25/50 MBEs can be configured to be either standalone systems with a buffer chamber and sample load lock or integrated with a linear transfer line or a radial distribution chamber as a part of a Materials Innovation Platform (MIP).
All EVO-25/50 MBE systems come with the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.
More Information
Software: MISTRAL & Evaporation Control
The EVO-25/50 MBEs include the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. Integrated safety interlocks protect the UHV system in case of power failure or a drop in water flow.
The evaporation control software offers a powerful script editor for programming individual process recipes. Additionally, 24/7 data logging of all relevant system parameters is included.
With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.
Applications
The EVO-25/50 MBEs are designed for forefront research. Our customers use their systems for a variety of material systems, such as:
- Topological Insulators
- 2D Materials, e.g. Transition metal dichalcogenides (TMDCs)
- Oxides
- Organics
- Intermetallic Compounds
- Semiconductors
- Heterostructures
- Thin Film Solar Cells
Specifications
Target Specification*
Stainless steel
< 1×10-10 mbar
Ion gauge
Double walled, designed for LN2
Up to 2“ diameter
* Specifications for standard configuration. Customisations can influence specifications.
Up to 10 ports DN63CF
Equipped with Viewport Shutters
Growth control software included
RHEED
Quartz Micro Balance
Beam Flux Monitor
Quadrupole mass analyser (RGA)
Pyrometer
For full specifications and more information about product options, please do not hesitate to contact your local sales representative.
Reference systems
Nanofabrication & Epitaxy Cluster
The Nanofabrication and Epitaxy Cluster is a multi-user platform of the Helmholtz Foundation for research on structures and devices for quantum computing, semiconductor technology and materials, and concepts for novel devices. Extended in 2020 by a NanoScanLab (FIB/SEM), Large Sample SPM for 4" wafers, and LEED module.
more
Materials Innovation Platform (MIP) with EVO-50 MBE, ARPES and LT Nanoprobe
The 2DCC-MIP is focused on advancing the synthesis of 2D materials within the context of a national user facility. The 2DCC is developing custom deposition tools with in-situ and real time characterisation and facilities for bulk growth of chalcogenide single crystals. Unique capabilities are also available to simulate growth kinetics through first principles and a reactive potential approach.
more
Materials Innovation Platform (MIP) with MBE, ALD, and XPS
The group’s multidisciplinary research focuses on the growth, characterisation, and device physics of quantum and semiconductor materials for novel devices and applications. Their approach utilises advanced molecular beam epitaxy techniques, selective area atomic layer deposition, and highly developed materials characterisation to fundamentally understand the nucleation and growth process, material nanostructure, chemical bonding, and experimentally determined band structure. They then correlate those findings with advanced electrical transport and magnetic measurements from devices that they fabricate to take full advantage of the novel properties of the materials and heterostructures that are created. Their current research interests include semiconductor defects for quantum communication, topologically protected transport in semiconductors and metals, magnetic properties in 2D materials, and back-end-of-line materials and device integration.
more
Materials Innovation Platform (MIP) for Epitaxial Quantum Materials
Research focus on controlled synthesis of epitaxial thin films and nanostructures, including: ferroelectrics, strongly correlated oxides, multiferroics, superconductors, thermoelectrics, photovoltaics, oxide catalysts, electronic/ionic conductors, and the characterisation of their functional properties.
more
Materials Innovation Platform (MIP) with 3 MBE Modules
Research focus on the topologically protected quantum effects in solid states, electron correlations and quantum coherence in semiconductor nanostructures, many-body effects in quantum Hall systems, interplay between disorder and interaction as well as the design, growth and fabrication of two-dimensional electron systems with controlled physical properties.
more
Materials Innovation Platform (MIP) for Novel Quantum Materials
Materials Innovation Platform (MIP) to enable research on the combination of different material classes for the development of novel quantum materials.
moreDownloads
EVO-50 MBE System: Next Generation of Customisable MBE Solution
The EVO-50 MBE System is designed to fulfil the highest and most stringent requirements of modern thin-film deposition. It is suitable and optimised for the growth of ultra-high purity semiconductors and related material systems.
MBE Solutions: Modular MBE Systems
The MBE Solution is comprised of Lab10 MBE, EVO-25/-50 and PRO-75/100 enabling MBE and analysis in a single system. The key features include 1) excellent sample thickness and doping homogeneity; 2) layer growth with outstanding performance; 3) low background doping level; 4) excellent carrier density and mobility; and 5) very low defect density.
