Thin Film Deposition

Introduction

Since 1998 we have focused on the increasing demands of the growth and characterisation of high-purity epitaxial layers (MBE) combined with in-situ scanning probe microscope (SPM) and electron spectroscopy (XPS, ARPES, SAM).

Scienta Omicron offers compact MBE systems for fundamental research. The available sample size ranges from flag style samples up to 4” wafer samples.

Please contact us with ideas on how we can develop the future of thin film deposition together.

Lab10 MBE

The Lab10 MBE is a small sample deposition tool for explorative materials research under UHV conditions. It is a flexible system platform suitable for a large range of MBE applications such as the growth of 2D materials, intermetallic compounds, oxide heterostructures or organic layers. The Lab10 MBE includes superior evaporation control software and offers multiple ports for in-situ characterisation.

EVO-25/50 MBE

The EVO-25/50 MBEs are deposition tools for explorative materials research under UHV conditions on substrates up to 2 inches in diameter. They are flexible system platforms suitable for a large range of MBE applications such as the growth of 2D materials, intermetallic compounds, oxide heterostructures or semiconductors. The EVO-25/50 MBEs include superior evaporation control software and offers multiple ports for in-situ characterisation.

PRO-75/100 MBE

The PRO-75/100 MBEs are deposition tools for materials research under UHV conditions on substrates up to 4 inches in diameter. They are flexible system platforms suitable for a large range of MBE applications such as the growth of 2D materials, intermetallic compounds, oxide heterostructures or semiconductors. The PRO-75/100 MBEs include superior evaporation control software and offers multiple ports for in-situ characterisation.

PVD 50 System

The PVD 50 System is designed to fulfil the highest and most stringent requirements of modern thin-film deposition. Real Ultra High Vacuum (UHV) base pressure reduces contaminations in the grown films and enables integration to surface science analysis instruments. The PVD 50 is suitable and optimised for the growth of metals, oxides, magnetic materials and superconductor material systems.