NanoSAM Lab with Sputter Depth Profiling and XPS

Technische Universität Clausthal - Physikalisches Institut

PES XPS AES SAM SEM Sputter Profiling

Reference Number: 84406

Central lab facility for materials characterisation on the nm scale with SEM, SAM, XPS and sputter depth profiling capabilities.

  • NanoScan Lab 
  • UHV Gemini 
  • NanoSAM EA 
  • DAR 400
  • FIG 05

Integrated Instruments