PRO-75 MBE System  | © Scienta Omicron
Example for a PRO-75 MBE system equipped with a multi-pocket e-beam evaporator and a crossbeam RGA for improved beamflux stability. Figure from project: 123708

PRO 75/100 MBE

Research Tools for Epitaxial Layer Growth

PVDMBELaser MBE

  • MBE system optimised for 4 inch wafer growth
  • Large effusion cell capacity for increased up-time
  • Flexible configurations, from topological insulators to semiconductors and metal oxides
  • In-situ growth monitoring
  • Reliable & fast sample transfer
  • Growth process controlled by advanced software
  • Designed as a module of a Materials Innovation Platform (MIP)

The PRO-75/100 MBEs are deposition tools for material research under UHV conditions on substrates up to 4 inches in diameter. They are flexible system platforms suitable for a large range of MBE applications such as the growth of 2D materials, intermetallic compounds, oxide heterostructures or semiconductors. The PRO-75/100 MBEs include superior evaporation control software and offers multiple ports for in-situ characterisation.

The PRO-75/100 MBE systems are dedicated growth systems with a load lock chamber and with an optional preparation/storage chamber. The substrate sizes are either 3” (PRO-75) or 2” (PRO-100). The carefully designed chamber with up to 12 effusion cells shows excellent thickness uniformity for all substrate sizes.

The PRO-75/100 MBE systems are designed to fulfil the highest and most stringent requirements of modern thin-film deposition. They are suitable and optimised for the growth of ultra-high purity semiconductors and related material systems.

All PRO-75/100 MBE systems come with the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.

More Information

MISTRAL & Evaporation Control

Screenshot of the software that is compatible with the PRO75-100 MBE | © Scienta Omicron
Screenshot of a typical software environment with and highlighted features.

The PRO-75/100 MBEs include the MISTRAL control system together with a powerful evaporation control software. The control system is based on certified standard components for supreme reliability and provides a graphical status overview of all sensor values. Integrated safety interlocks protect the UHV system in case of power failure or a drop in water flow.

The evaporation control software offers a powerful script editor for programming individual process recipes. Additionally, 24/7 data logging of all relevant system parameters is included.

With this software bundle, experiments can be conducted under well-controlled and reproducible conditions.

Applications

The PRO-75/100 MBEs are designed for forefront research. Our customers use their systems for a variety of material systems, such as:

  • Topological Insulators
  • 2D Materials, e.g. Transition metal dichalcogenides (TMDCs)
  • Oxides
  • Organics
  • Intermetallic Compounds
  • Semiconductors
  • Heterostructures
  • Thin Film Solar Cells

Specifications

Property

Target Specification*

Vacuum tank

Stainless steel

Pressure

< 1×10-10 mbar

Pressure sensor

Ion gauge

Cryopanel

Doublewalled, designed for LN2

Substrate size

Up to 4“ diameter

* Specifications for standard configuration. Customisations can influence specifications.

Source ports

Up to 12 ports: 6x DN100CF (6” OD) + 6x DN63CF (4.5” OD)

Viewports

Equipped with Viewport Shutters

Software package

Growth control software included

Preconfig. flanges

RHEED

Quartz Micro Balance

Beam Flux Monitor

Quadrupole mass analyser (RGA)

Pyrometer

For full specifications and more information about product options, please do not hesitate to contact your local sales representative.

Reference systems

Nanofabrication & Epitaxy Cluster | © Scienta Omicron
121403

Nanofabrication & Epitaxy Cluster

The Nanofabrication and Epitaxy Cluster is a multi-user platform of the Helmholtz Foundation for research on structures and devices for quantum computing, semiconductor technology and materials, and concepts for novel devices. Extended in 2020 by a NanoScanLab (FIB/SEM), Large Sample SPM for 4" wafers, and LEED module.

more
Epitaxy Laboratory  | © Scienta Omicron
121426

Epitaxy Laboratory

Materials Innovation Platform (MIP) with research focus on fabrication of epitaxially grown III-N semiconductors for optoelectronics and spintronics using a state-of-the-art cleanroom lab.

more
PRO 75/100 MBE | © Scienta Omicron
123708

PRO 75/100 MBE for Oxide materials

Standalone PRO 75/100 MBE system configured for the growth of oxide materials on wafer samples up to 4” in diameter.

more
Customised Multichamber MBE | © Scienta Omicron
035008

Materials Innovation Platform (MIP) with MBE, PVD and Surface Analysis

Research focus on nanoscale materials, interfaces and advanced devices including, high-k gate dielectrics, gate electrodes and novel 2D materials (TMDs, e.g. MoS2). 

more
Materials Innovation Platform (MIP) with MBE and Surface Analysis
74504

Materials Innovation Platform (MIP) with MBE and Surface Analysis

Institute for Integrative Nanosciences (IIN) research activities cover flexible and printable magneto-electronic devices, self-propelled nanotools, strain-tunable single photon devices, ultra-compact self-wound batteries, as well as binary GaAs, AlAs, InAs layers, ternary InGaAs & AlGaAs compounds and self-assembled InAs and GaAs quantum dots.

more

Downloads

MBE Solutions: Modular MBE Systems

4.63 MB

The MBE Solution is comprised of Lab10 MBE, EVO-25/-50 and PRO-75/100 enabling MBE and analysis in a single system. The key features include 1) excellent sample thickness and doping homogeneity; 2) layer growth with outstanding performance; 3) low background doping level; 4) excellent carrier density and mobility; and 5) very low defect density.

Services & Spare-parts

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