ALD Lab

PVDALD

We are sorry. This instrument is not available as component but only as part of our system solutions. Please contact us for any question.

Reference systems

Nanofabrication & Epitaxy Cluster | © Scienta Omicron
121403

Nanofabrication & Epitaxy Cluster

The Nanofabrication and Epitaxy Cluster is a multi-user platform of the Helmholtz Foundation for research on structures and devices for quantum computing, semiconductor technology and materials, and concepts for novel devices. Extended in 2020 by a NanoScanLab (FIB/SEM), Large Sample SPM for 4" wafers, and LEED module.

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Materials Innovation Platform (MIP) with Five Deposition Modules and XPS, UPS, AES, ISS, SPM | © Scienta Omicron
121547

Materials Innovation Platform (MIP) for Novel Quantum Materials

Materials Innovation Platform (MIP) to enable research on the combination of different material classes for the development of novel quantum materials.

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Molecular Beam Epitaxy (MBE), Atomic Layer Deposition (ALD), and in-situ X-Ray Photoelectron Spectroscopy Laboratory | © Scienta Omicron
163504

Materials Innovation Platform (MIP) with MBE, ALD, and XPS

The group’s multidisciplinary research focuses on the growth, characterisation, and device physics of quantum and semiconductor materials for novel devices and applications.

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