Linear Transfer Line System  | © Scienta Omicron
The Linear Transfer Line is designed in a modular way, using 3 m long movable segments with a high degree of flexibility regarding the pump configuration and sample carriers.
Linear Transfer Line System  | © Scienta Omicron
Materials Innovation Platform for an Industrial R&D Lab, using a Linear Transfer Line as the system backbone to connect MBE modules for III-V semiconductors, topological insulators, and metals.
Linear Transfer Line Trolley | © Scienta Omicron
Sample trolley for up to six 2” wafer carrier rings. Flag-style sample holders can be transferred using adapter carrier rings.

Linear Transfer Line (LTL)

A Versatile Backbone for UHV Cluster Systems

  • Convenient sample transfer under true UHV conditions
  • Robust magnetic coupling between external driver and in-UHV sample trolley maintains connection as the trolley passes through flange connections and gate valves
  • Sample trolley accepts multiple sample plates or wafer carrier rings
  • Samples and even the whole trolley are easily exchanged via the load lock segment
  • No length restrictions
  • Designed for future expandability, also in combination with Rotary Distribution Chambers (RDC)

The Linear Transfer Line (LTL) is a backbone for reliable and convenient sample handling in large UHV systems. Its modular design allows for cost-effective individual configurations, particularly of its length, the pumping system and the sample plates or wafers used. The LTL is easy to extend with additional segments to allow users to extend their UHV cluster step-by-step.

The newly developed Linear Transfer Line (LTL) efficiently connects new and existing growth and analysis modules for Materials Innovation Platforms. The transfer is composed of independent, movable 3 m long segments and therefore removes length restrictions and provides for cost-effective expandability.

Optimised pumping and quality design ensure true UHV conditions while providing a high degree of configuration flexibility. Gate valves can be used to separate LTL sections, minimising cross-contamination and isolating subsystems for servicing. Multiple LTLs can easily be integrated with rotary distribution chambers.

The trolley is moved either manually or with an optional stepper motorisation. If the latter is chosen, the MISTRAL system control is provided installed on a tablet PC to ensure maximum flexibility and convenience while the users navigate their samples through the cluster system.

Reference systems

Materials Innovation Platform (MIP) with MBE and Surface Analysis
74504

Materials Innovation Platform (MIP) with MBE and Surface Analysis

Institute for Integrative Nanosciences (IIN) research activities cover flexible and printable magneto-electronic devices, self-propelled nanotools, strain-tunable single photon devices, ultra-compact self-wound batteries, as well as binary GaAs, AlAs, InAs layers, ternary InGaAs & AlGaAs compounds and self-assembled InAs and GaAs quantum dots.

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Nanofabrication & Epitaxy Cluster | © Scienta Omicron
121403

Nanofabrication & Epitaxy Cluster

The Nanofabrication and Epitaxy Cluster is a multi-user platform of the Helmholtz Foundation for research on structures and devices for quantum computing, semiconductor technology and materials, and concepts for novel devices. Extended in 2020 by a NanoScanLab (FIB/SEM), Large Sample SPM for 4" wafers, and LEED module.

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Materials Innovation Platform (MIP) with Five Deposition Modules and XPS, UPS, AES, ISS, SPM | © Scienta Omicron
121547

Materials Innovation Platform (MIP) for Novel Quantum Materials

Materials Innovation Platform (MIP) to enable research on the combination of different material classes for the development of novel quantum materials.

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Scienta Omicron's Linear Transfer Line at the School of Materials Science & Engineering, Tsinghua University | © Scienta Omicron
163307

Materials Innovation Platform (MIP) with MBE, NanoScan Lab, VT AFM and ARPES Lab

Research focuses on Magnetic Films and Spintronics, including antiferromagnet spintronics and multi-field control of magnetism.

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The Quantum Solid State Physics Research System for the NTT Group, Japan | © Scienta Omicron
173505

Materials Innovation Platform (MIP) with 3 MBE Modules

Research focus on the topologically protected quantum effects in solid states, electron correlations and quantum coherence in semiconductor nanostructures, many-body effects in quantum Hall systems, interplay between disorder and interaction as well as the design, growth and fabrication of two-dimensional electron systems with controlled physical properties.

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The VT SPM Lab, Lab 10 MBE,  MIP, and VT Systems at School of Physical Science and Technology, Shanghai Tech University | © Scienta Omicron
182905

Compact Materials Innovation Platform (MIP) with Lab10 MBE and VT SPM Lab

Materials Innovation Platform (MIP) to investigate novel materials such as monolayer transition metal dichalcogenides (TMDC).

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UHV Cluster System at the D&S Research Center, Samsung Electronics Co.,Ltd. | © Scienta Omicron
183917

Surface Science Analysis Cluster System

Cluster system offering multiple complementary surface science techniques, as XPS, UPS and AFM for detailed sample characterisation. The analysis system is integrated into a linear transfer line to ensure future expandability.

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Nanolab with FIB/SEM and LS STM | © Scienta Omicron
184704

NanoScan Lab with FIB/SEM and Large Sample SPM

Extension to the large 14 modules HNF cluster by a NanoScan Lab for SEM/FIB and an SPM module. Both modules are interfaced to the existing cluster and work on 4" samples.

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Customised Multichamber MBE | © Scienta Omicron
035008

Materials Innovation Platform (MIP) with MBE, PVD and Surface Analysis

Research focus on nanoscale materials, interfaces and advanced devices including, high-k gate dielectrics, gate electrodes and novel 2D materials (TMDs, e.g. MoS2). 

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