OREZ Effusion Cell  | © Scienta Omicron
OREZ.

OREZ

Oxygen Resistant Effusion Cells

PVDMBE

  • Oxygen resistance option for standard wire heater cells (WEZ, PEZ, NTEZ)
  • Ni-alloy-wire heaters up to 1000 °C
  • Noble-metal-alloy-wire heaters up to 1200 °C
  • Pressure range from UHV up to several mbar
  • Various crucible sizes and crucible materials
  • Various filament configurations

The Oxygen Resistant Effusion Cell (OREZ) is designed for the operation in oxygen rich or reactive gas atmosphere for a pressure range from 10-4 mbar/torr up to several mbar/torr.

The use of a special Ni-alloy for heater wires and shielding parts allow the operation of the source in UHV and oxygen containing atmosphere up to a temperature of 1000 °C. By using noble-metal-alloys for heater wires, shielding and construction materials, operating temperatures of up to 1200°C are achievable.

  • Reliable, compact and robust cell design
  • Cleanest operation in UHV systems
  • Excellent temperature stability (± 0.1 °C)
  • Standard, hot lip, cold lip and dual filament configurations available
  • Standard crucible sizes: 10 cc, 35 cc, 60 cc
  • Standard crucible material: PBN (pyrolytic boron nitride)
  • Other crucible materials: Al2O3, MgO, BeO, Y2O3, Quartz
  • Optional integrated water cooling and/or integrated rotary shutter