Close up of the EBVV 63-4 E-Beam Evaporator | © Scienta Omicron
EBVV 63-4 on DN63CF (4.5” OD) flange.

EBVV 63

Vertical E-Beam Evaporator

PVDEBPVD

  • High purity e-beam evaporation
  • 270° beam deflection
  • 3 kW power
  • High frequency x-y-beam deflection system

The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).

Vertically oriented compact UHV electron beam evaporator with DN63CF (4.5" OD) mounting flange and 4 cc / 5 cc hearth volume.

  • Fully UHV compatible construction
  • Small dimension: DN63CF(4.5“ OD) mounting flange
  • Hearth volumes 4 cm3 (5 cm3) with 15° (12°) taper and 15 mm depth
  • Effective water cooling of the hearth
  • Long filament lifetime
  • Easy maintenance
  • 270° beam deflection
  • Acceleration voltage from 4 to 10 kV
  • High frequency x-y-beam deflection system
  • Silicon shielding parts for use in SiGe-MBE