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Nanofabrication & Epitaxy Cluster
The Nanofabrication and Epitaxy Cluster is a multi-user platform of the Helmholtz Foundation for research on structures and devices for quantum computing, semiconductor technology and materials, and concepts for novel devices. Extended in 2020 by a NanoScanLab (FIB/SEM), Large Sample SPM for 4" wafers, and LEED module.more
NanoScan Lab with FIB/SEM and Large Sample SPM
Extension to the large 14 modules HNF cluster by a NanoScan Lab for SEM/FIB and an SPM module. Both modules are interfaced to the existing cluster and work on 4" samples.more