Radial Distribution Chamber  | © Scienta Omicron
Radial Distribution Chamber with control electronics integrated into the bench to ensure a minimum footprint

Radial Distribution Chamber (RDC)

Super-Flexible Transfer Backbone for UHV Clusters

  • Safe and easy sample handling
  • Suitable for flag-style sample holders or wafers up to 4" diameter
  • Individually designed UHV chamber for best use of lab space
  • Easily configurable regarding pumps and motorisation
  • Fully integrated into MISTRAL system control

The Radial Distribution Chamber (RDC) is based on a continuously rotatable telescopic transfer arm that can be equipped with a variety of end effectors for flag-style sample holders or wafer carrier rings for up to 4” wafers. The port configuration of the RDC can be adjusted to arrange the connected modules such that the available lab space is used in an optimal way.

With the optional motorisation package, the need for manual action by the user can be kept to a minimum. The motors are integrated into the MISTRAL system control, which makes the RDC a convenient and robust sample transfer solution.

Since magnetic transfer arms are not needed any more, there are fewer constraints on the arrangement of the connected system modules. This helps to make optimal use of the precious lab space. Compact appendix chambers are available for special purposes such as sample heating and degassing, cleaving, storage or catalysis experiments.

The RDC gives maximum flexibility in the system design due to its compatibility with the Linear Transfer Line, a glove box, UHV suitcase or a connection to 3rd party modules. Since it is possible to add further RDCs at a later stage, possibly including a relocation of existing modules to make space for new modules, the initial investment is sustainable for the long term.

Reference systems

Nanofabrication & Epitaxy Cluster | © Scienta Omicron

Nanofabrication & Epitaxy Cluster

The Nanofabrication and Epitaxy Cluster is a multi-user platform of the Helmholtz Foundation for research on structures and devices for quantum computing, semiconductor technology and materials, and concepts for novel devices. Extended in 2020 by a NanoScanLab (FIB/SEM), Large Sample SPM for 4" wafers, and LEED module.

Epitaxy Laboratory  | © Scienta Omicron

Epitaxy Laboratory

Materials Innovation Platform (MIP) with research focus on fabrication of epitaxially grown III-N semiconductors for optoelectronics and spintronics using a state-of-the-art cleanroom lab.

Materials Innovation Platform with EVO50 MBE, ARPES and LT Nanoprobe at the 2D Crystal Consortium (2DCC-MIP) | © Penn State University

Materials Innovation Platform (MIP) with EVO-50 MBE, ARPES and LT Nanoprobe

The 2DCC-MIP is focused on advancing the synthesis of 2D materials within the context of a national user facility. The 2DCC is developing custom deposition tools with in-situ and real time characterisation and facilities for bulk growth of chalcogenide single crystals. Unique capabilities are also available to simulate growth kinetics through first principles and a reactive potential approach.

Molecular Beam Epitaxy (MBE), Atomic Layer Deposition (ALD), and in-situ X-Ray Photoelectron Spectroscopy Laboratory | © Scienta Omicron

Materials Innovation Platform (MIP) with MBE, ALD, and XPS

The group’s multidisciplinary research focuses on the growth, characterisation, and device physics of quantum and semiconductor materials for novel devices and applications.

Epitaxial Quantum Materials | © Scienta Omicron

Materials Innovation Platform (MIP) for Epitaxial Quantum Materials

Research focus on controlled synthesis of epitaxial thin films and nanostructures, including: ferroelectrics, strongly correlated oxides, multiferroics, superconductors, thermoelectrics, photovoltaics, oxide catalysts, electronic/ionic conductors, and the characterisation of their functional properties.

Molecular Beam Epitaxy (MBE) System and Angle-Resolved Photoemission Spectroscopy (ARPES) Cluster Tool for the Nanyang Technological University  | © Scienta Omicron

Cluster Tool for MBE and ARPES

Materials Innovation Platform (MIP) with ARPES and MBE modules for the growth and characterisation of topological insulator chalcogenide crystals.

LT STM, MIP and MBE at Wuhan University | © Scienta Omicron

Materials Innovation Platform (MIP) with LT STM and MBE

Nanolab with FIB/SEM and LS STM | © Scienta Omicron

NanoScan Lab with FIB/SEM and Large Sample SPM

Extension to the large 14 modules HNF cluster by a NanoScan Lab for SEM/FIB and an SPM module. Both modules are interfaced to the existing cluster and work on 4" samples.