E-Beam Evaporators

Introduction

Electron beam evaporators are the best choice to achieve high flux rates for low vapour pressure materials. We offer compact rod evaporators and (multi-) hearth e-beam evaporators, both types fully UHV compatible.

Find the evaporator for your application below and contact us for detailed information.

EFM 3

The famous EFM 3 electron beam evaporator is designed for evaporation from wires, rods or crucibles. Highest quality, unsurpassed cleanliness and continuous innovation have made the EFM 3/3s the market leading e-beam evaporator. Today the EFM 3/3s has been cited in several 1000 publications proving the scientific relevance of its dedicated design for surface science.

EFM 3i (IBAD)

The EFM 3i is specifically designed to facilitate layer-by-layer growth in cases where it does not occur naturally. It allows for the controlled evaporation of the target material and the simultaneous generation of ions to create additional surface defects (Ion-Beam-Assisted Deposition (IBAD)).

EFM 4

Based on the famous EFM 3 the EFM4/4s electron beam evaporators are designed for evaporation from wires, rods or crucibles. The 3 different exit apertures though allow to cover a larger sample area up to 50 mm. Besides this all other features of the EFM 3 are preserved.

EFM 3T Triple Evaporator

Based on the design concept of the EFM 3 evaporators, the triple evaporator EFM 3T features three independent cells for the evaporation of a wide range of materials from wires, rods or crucibles.

EFM-H

The EFM-H is a source to provide atomic hydrogen based on the design of the EFM 3. A flange NW 16 CF on the rear side is used for molecular hydrogen inlet including a pumping by-pass to clean the piping prior to H2 disposal.

EBVV 63

The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).

EBV40/100

The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).

EBVM

The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).