The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).
Vertically oriented compact UHV electron beam evaporator with DN63CF (4.5" OD) mounting flange and 4 cc / 5 cc hearth volume.
- Fully UHV compatible construction
- Small dimension: DN63CF(4.5“ OD) mounting flange
- Hearth volumes 4 cm3 (5 cm3) with 15° (12°) taper and 15 mm depth
- Effective water cooling of the hearth
- Long filament lifetime
- Easy maintenance
- 270° beam deflection
- Acceleration voltage from 4 to 10 kV
- High frequency x-y-beam deflection system
- Silicon shielding parts for use in SiGe-MBE