The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).
Horizontally mounted multiple pocket UHV electron beam evaporator on a DN200CF/DN250CF (10”/12” OD) mounting flange with up to 4(6) x 8cc or 3(6) x 15cc hearth volume.
- Fully UHV compatible construction
- DN200CF/DN250CF (10”/12” OD) mounting flange
- Hearth volumes up to 6 times with 8 cm3 or 6 times with 15 cm3
- Effective water cooling of the hearth
- Long filament lifetime
- Easy maintenance
- 270° beam deflection
- Standard 3 kW or 5 kW power
- Acceleration voltage from 4 to 10 kV
- High frequency x-y-beam deflection system
- All-metal sealed design
- Manual linear translation